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The nano-SiOx deposited in magnetized plasma for gas and humid barrier application

Form:    Author:    Data: 2015-12-08
Zhengduo Wang, Lizhen Yang, Lijun San, Zhongwei Liu, Qiang Chen,
The nano-SiOx deposited in magnetized plasma for gas and humid barrier application,
The sixth International Symposium on Plasma Nanosciences (iPlasmaNano VI), 2015, August 25-29, Beijing (invited)