The Characterization of Short -Tube Helicon Plasma Source and its Applications
Form: Author: Data: 2015-12-08
Zhengduo Wang, Gao Zhao , Yu Wang, Ma Chao, Cheng Niu, Lizhen Yang, Zhongwei Liu, Qiang Chen,
The Characterization of Short -Tube Helicon Plasma Source and its Applications,
The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) , 2015, September 20- 24, Jeju, Republic of Korea(oral)
