Nitrogen doped p-type ZnO films fabricated by HPPMS with ICP plasma
Form: Author: Data: 2015-12-08
Haitao Zhang , Jyhshiarn Cherng, Zhengduo Wang, Zhongwei Liu and Qiang Chen,
Nitrogen doped p-type ZnO films fabricated by HPPMS with ICP plasma,
The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015) , 2015,September 20- 24, Jeju, Republic of Korea(oral)
