Comparison of thermal and plasma-enhanced ALD Al2O3 With different oxidant sources on the sidewall
Form: Author: Data: 2014-12-05
Yuanxin Zhao, Lijun Sang, Zhongwei Liu, Zhengduo Wang, Lizhen Yang,
Comparison of thermal and plasma-enhanced ALD Al2O3 With different oxidant sources on the sidewall of Si trenches,
2nd International Conference on ALD Applications & 3rd China ALD conference？, 2014.10-14-17, Shanghai, China(poster)
