Growth of Copper Films via Plasma Enhanced Atomic Layer Deposition
Form: Author: Data: 2014-12-05
Zheng Guo, Zhongwei Liu, Qiang Chen, Lijun Sang,
Growth of Copper Films via Plasma Enhanced Atomic Layer Deposition,
2nd International Conference on ALD Applications & 3rd China ALD conference？, 2014.10-14-17, Shanghai, China(oral)
