Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer dep
Form: Author: Data: 2014-08-21
Wenwen Lei， Qiang Chen，
Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition，
J. Vac. Sci. Technol. A 31, 01A114 (2013); doi: 10.1116/1.4764112
