Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
Form: Author: Data: 2014-08-21
LEI Wenwen,LI Xingcun,CHEN Qiang,WANG Zhengduo，
Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic，
Plasma Science and Technology, Vol.14, No.2, Feb. 2012
