Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses
Form: Author: Data: 2014-08-21
Chunqing Huo,Michael A Raadu,Daniel Lundin,Jon Tomas Gudmundsson,Andr´ e Anders Nils Brenning，
Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses，
PLASMA SOURCES SCIENCE ANDTECHNOLOGY
