Characteristics and properties of metal aluminum thin films prepared by electron cyclotron resonance
Form: Author: Data: 2014-08-20
Xiong Yu-Qing,Li Xing-Cun,Chen Qiang,Lei Wen-Wen, Zhao Qiao, Sang Li-Jun,Liu Zhong-Wei, Wang Zheng-Duo, and Yang Li-Zhen,
Characteristics and properties of metal aluminum thin films prepared by electron cyclotron resonance plasma-assisted atomic layer deposition technology,
Chin. Phys. B Vol. 21, No. 7 (2012) 078105
