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退火温度对溅射铝膜结构与电性能的影响

Form: Author: Data: 2014-08-20

程丙勋,吴卫东,何智兵,许华,唐永建,卢铁城,
退火温度对溅射铝膜结构与电性能的影响,
H I GH PO WER L A S ER A ND PA R T ICL E B EA MS Vol . 20 , No . 1 J a n . ,2008
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