Deposition of nano-diamond-like carbon films and diagnostic by optical emission spectrum in at an at
Form: Author: Data: 2014-06-21
Xinchao Bian, Qiang Chen, Yuefei Zhang, Lijun Sang, Wenjie Tang,
Deposition of nano-diamond-like carbon films and diagnostic by optical emission spectrum in at an atmospheric pressure plasma gun,
The Sixth Asian-European International Conference on Plasma Surface Engineering, September 24-29 2007, Nagasaki, Japan
