SiO2-like film deposition by dielectric barrier discharge plasma gun at ambient temperature under an
Form: Author: Data: 2014-06-21
Qiang Chen, Yuefei Zhang, Erli Han, and Yuanjing Ge,
SiO2-like film deposition by dielectric barrier discharge plasma gun at ambient temperature under an atmospheric pressure,
J. Vac. Sci. Technol. A, 24(6) (2006)2082-2086
Copyright©2004-2009 LPPM All Rig
