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SiO2-like film deposition by dielectric barrier discharge plasma gun at ambient temperature under an

Form:    Author:    Data: 2014-06-21
Qiang Chen, Yuefei Zhang, Erli Han, and Yuanjing Ge,
SiO2-like film deposition by dielectric barrier discharge plasma gun at ambient temperature under an atmospheric pressure,
J. Vac. Sci. Technol. A, 24(6) (2006)2082-2086
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