Gas barrier properties of amorphous hydrogenated carbon films by plasma-enhanced CVD
Form: Author: Data: 2014-08-05
Yuefei Zhang, Qiang Chen, Yu Wang, Guangqiu Zhang, Yuanjing Ge,
Gas barrier properties of amorphous hydrogenated carbon films by plasma-enhanced CVD,
Proceeding of the 17th International Symposium on Plasma Chemistry, Toronto, Canada, 2005
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