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Study on the preparation of high barrier hydrogenated carbon film and it s properties

Form:    Author:    Data: 2014-08-05
Chen Guang-Liang, Ge Yuan-Jing, Zhang Yue- Fei, Zhang Guang-Qiu, Zhang Gu-Ling, Wang Jiu-Li, Liu Yuan- Fu,¡¡Gu Wei-Chao, Feng Wen-Ran1, Liu Chi-Zi,Yang Si-Ze,
Study on the preparation of high barrier hydrogenated carbon film and it s properties,
ACTA PHYSICA SINICA, 54(2005) 818-823