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Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

Form:    Author:    Data: 2014-08-05
J. W. Elam,D. Routkevitch,P. P. Mardilovich,S. M. George,
Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition,
Chem. Mater.2003,15,3507-3517