Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition
Form: Author: Data: 2014-08-05
J. W. Elam,D. Routkevitch,P. P. Mardilovich,S. M. George，
Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition，
Chem. Mater.2003,15,3507-3517
