Hydrogenated amorphous carbon films deposited by RF plasma of CH4/Ar
Form: Author: Data: 2014-08-05
Yuefei Zhang, et al,
Hydrogenated amorphous carbon films deposited by RF plasma of CH4/Ar,
11th National Conference of Plasma Science and Technology, Hefei , 2003 (in chinese)
Copyright©2004-2009 LPPM All Rights Reserved.
