On sheath energization and Ohmic heating in sputtering magnetrons
Form: Author: Data: 2014-08-21
Chunqing Huo,Daniel Lundin, Michael A Raadu,Andr´ e Anders,Jon Tomas GudmundssonNils BrenningŁ¬
On sheath energization and Ohmic heating in sputtering magnetronsŁ¬
PLASMA SOURCES SCIENCE ANDTECHNOLOGY
