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MPECVD中氧气浓度对氧化硅薄膜性能的影响
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2014-08-21
齐凤阳,陈 强,刘福平,
MPECVD中氧气浓度对氧化硅薄膜性能的影响,
CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 2012年9月