Deposition of silicon oxide barrier film by PDPs with or without Ar plasma pretreatment
Form: Author: Data: 2014-06-21
Yunjing Sun, Yabo Fu, Qiang Chen, Chunmei Zhang, Yuefei Zhang，
Deposition of silicon oxide barrier film by PDPs with or without Ar plasma pretreatment,
The Proceeding of 18th international plasma chemistry conference, 2007.8, Kyoto
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