The SiOx film deposited in magnetized plasma
Form: Author: Data: 2014-06-21
Qiang Chen, Yunjin Sun, Yabo Fu, Yuefei Zhang, Yang LiuŁ¬
The SiOx film deposited in magnetized plasmaŁ¬
The Proceeding of 18th international plasma chemistry conference, 2007.8, Kyoto
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