The comparison of friction property of DLC films deposited in two PECVD methods
Form: Author: Data: 2014-08-05
Liqiong He, Yuefei Zhang, Yu Wang, Qiang Chen, and Yuanjing Ge,
The comparison of friction property of DLC films deposited in two PECVD methods,
Trans. Beijing Institute of Technology 6(2005)154-159 (in Chinese
