The effect of negative self-bias on plasma polymerization by PF-PECVD technique
Form: Author: Data: 2014-08-05
Hua Peng, Yuanjing Ge, Yuefei Zhang, Guangqiu Zhang,
The effect of negative self-bias on plasma polymerization by PF-PECVD technique,
11th National Conference of Plasma Science and Technology, 2003 (in chinese)
