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大气压PECVD和低气压PECVD沉积氧化硅薄膜的抗腐蚀性研究
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2015-12-08
杨海娇, 王国刚,高礼雄, 陈强,
大气压PECVD和低气压PECVD沉积氧化硅薄膜的抗腐蚀性研究,
第十七届全国等离子体科学技术会议,成都,2015.8.16-19(poster)