Origin of ultralow permittivity in polyimide/mesoporous silicate nanohybrid films with high resistiv

Form:    Author:    Data: 2014-06-14
Zhi-Min Dang, Lan-Jie Ma, Jun-Wei Zha, Sheng-Hong Yao, Dan Xie, Qiang Chen, and Xue Duan,
Origin of ultralow permittivity in polyimide/mesoporous silicate nanohybrid films with high resistivity and high breakdown strength,
J. Applied Physics, 105 (2009) 044104