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PECVD法低温沉积高阻隔SiOx薄膜
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2014-06-21
孙运金,桑利军,陈强,张军峰,张跃飞,
PECVD法低温沉积高阻隔SiOx薄膜,
第十三届全国等离子体科学与技术会议,2007年8月,四川成都
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