Barrier properties of hydrocarbon films by RF-PECVD with Ar/CH4
Form: Author: Data: 2014-08-05
Guangliang Chen, Yuefei Zhang, Yuanjing Ge, Guangqiu Zhang,
Barrier properties of hydrocarbon films by RF-PECVD with Ar/CH4,
11th National Conference of Plasma Science and Technology, 2003 (in chinese)
